Amorphous InGaZnO thin film transistors with sputtered silver source/drain and gate electrodes

Qi Wu; Ling Xu; Jianeng Xu; Haiting Xie; Chengyuan Dong

doi:10.1016/j.mssp.2016.02.024

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Amorphous InGaZnO thin film transistors with sputtered silver source/drain and gate electrodes

Qi Wu Ling Xu Jianeng Xu Haiting Xie Chengyuan Dong

Year: 2016 Journal: Materials Science in Semiconductor Processing Vol: 48 Pages: 23-26 Publisher: Elsevier BV

DOI: 10.1016/j.mssp.2016.02.024

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Keywords:

Materials science Thin-film transistor Ohmic contact Electrode Amorphous solid Optoelectronics Layer (electronics) Transistor Diffusion barrier Nanotechnology Electrical engineering Crystallography Voltage

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electrical and Thermal Properties of Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

Amorphous InGaZnO thin film transistors with sputtered silver source/drain and gate electrodes

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