Fabrication of silicon nanorod arrays via a facile metal-assisted chemical etching method

Yibin Zhu; Lei Zhou; Changjiang Pan; Xudong Guo; Feng Gu; H. L. Wang; Chaoying Ni

doi:10.1007/s10854-016-4499-0

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Fabrication of silicon nanorod arrays via a facile metal-assisted chemical etching method

Yibin Zhu Lei Zhou Changjiang Pan Xudong Guo Feng Gu H. L. Wang Chaoying Ni

Year: 2016 Journal: Journal of Materials Science Materials in Electronics Vol: 27 (6)Pages: 5833-5838 Publisher: Springer Science+Business Media

DOI: 10.1007/s10854-016-4499-0

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Keywords:

Fabrication Nanorod Nanotechnology Materials science Etching (microfabrication) Lithography Isotropic etching Polystyrene Reactive-ion etching Silicon Photolithography Optoelectronics Polymer Composite material

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Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Fabrication of silicon nanorod arrays via a facile metal-assisted chemical etching method

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