JOURNAL ARTICLE

Fabrication of silicon nanorod arrays via a facile metal-assisted chemical etching method

Yibin ZhuLei ZhouChangjiang PanXudong GuoFeng GuH. L. WangChaoying Ni

Year: 2016 Journal:   Journal of Materials Science Materials in Electronics Vol: 27 (6)Pages: 5833-5838   Publisher: Springer Science+Business Media
Keywords:
Fabrication Nanorod Nanotechnology Materials science Etching (microfabrication) Lithography Isotropic etching Polystyrene Reactive-ion etching Silicon Photolithography Optoelectronics Polymer Composite material

Metrics

3
Cited By
0.17
FWCI (Field Weighted Citation Impact)
22
Refs
0.56
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Nanowire Synthesis and Applications
Physical Sciences →  Engineering →  Biomedical Engineering
Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry
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