Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching

Ruiyuan Liu; Fute Zhang; Celal Con; Bo Cui; Baoquan Sun

doi:10.1186/1556-276x-8-155

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Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching

Ruiyuan Liu Fute Zhang Celal Con Bo Cui Baoquan Sun

Year: 2013 Journal: Nanoscale Research Letters Vol: 8 (1)Pages: 155-155 Publisher: Springer Science+Business Media

DOI: 10.1186/1556-276x-8-155

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Keywords:

Materials science Dewetting Nanotechnology Silicon Isotropic etching Nanochemistry Etching (microfabrication) Fabrication Lithography Nanoparticle Annealing (glass) Wafer Substrate (aquarium) Nanostructure Nanowire Optoelectronics Thin film Composite material

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Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Advancements in Semiconductor Devices and Circuit Design

Physical Sciences → Engineering → Electrical and Electronic Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching

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