Metal-Assisted Chemical Etching of Silicon: Preparation of Silicon Nanowire Arrays

E. Galopin; Kristien Lemmens; Gaëlle Piret; Yannick Coffinier; Sabine Szunerits; Rabah Boukherroub

doi:10.1149/ma2008-02/22/1810

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Metal-Assisted Chemical Etching of Silicon: Preparation of Silicon Nanowire Arrays

E. Galopin Kristien Lemmens Gaëlle Piret Yannick Coffinier Sabine Szunerits Rabah Boukherroub

Year: 2008 Journal: ECS Meeting Abstracts Vol: MA2008-02 (22)Pages: 1810-1810 Publisher: Institute of Physics

DOI: 10.1149/ma2008-02/22/1810

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Abstract

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Keywords:

Etching (microfabrication) Silicon nanowires Silicon Materials science Nanotechnology Metal Isotropic etching Nanowire Optoelectronics Metallurgy Layer (electronics)

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Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Anodic Oxide Films and Nanostructures

Physical Sciences → Materials Science → Materials Chemistry

Molecular Junctions and Nanostructures

Physical Sciences → Engineering → Electrical and Electronic Engineering

Metal-Assisted Chemical Etching of Silicon: Preparation of Silicon Nanowire Arrays

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Citation History

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