JOURNAL ARTICLE
Fabrication of Silicon Carbide Optics by Electrical Discharge Machining: Removal Characteristics of Silicon Carbide with Low Electrical Resistance
Year: 2014 Journal: Classical Optics 2014 Pages: JTu5A.5-JTu5A.5
Abstract
We discuss the application of electrical discharge machining in the forming step in the fabrication of SiC optics. Chemical vapor deposition SiC and sintered SiC plates were machined to investigate their removal characteristics.
Keywords:
Silicon carbide Fabrication Materials science Electrical discharge machining Machining Silicon Chemical vapor deposition Optoelectronics Carbide Electrical resistance and conductance Composite material Metallurgy
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Topics
Advanced Machining and Optimization Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Advanced machining processes and optimization
Physical Sciences → Engineering → Mechanical Engineering
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