Microstructuring of non-conductive silicon carbide by electrical discharge machining

Florian Zeller; T. Hösel; Claas Müller; Holger Reinecke

doi:10.1007/s00542-013-1965-y

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Microstructuring of non-conductive silicon carbide by electrical discharge machining

Florian Zeller T. Hösel Claas Müller Holger Reinecke

Year: 2013 Journal: Microsystem Technologies Vol: 20 (10-11)Pages: 1875-1880 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-013-1965-y

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Keywords:

Materials science Electrical discharge machining Machining Silicon carbide Ceramic Electrical conductor Composite material Silicon nitride Carbide Electrode Silicon Metallurgy

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Advanced Machining and Optimization Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced machining processes and optimization

Physical Sciences → Engineering → Mechanical Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Microstructuring of non-conductive silicon carbide by electrical discharge machining

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Citation History

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