Electrical Discharge Milling of Silicon Carbide with Different Electrical Conductivity

Abstract

Silicon Carbide is a ceramic material with extraordinary properties. Not only does it excel in mechanical properties, such as very high hardness and flexural strength, but also shows excellent thermal properties with a low thermal expansion and operating temperatures above 1000°C. These properties predestine silicon carbide for applications in harsh environments. Structuring silicon carbide in the sintered state with conventional methods is not feasible due to its hardness. A non-conventional process to structure materials independent of their mechanical properties is electrical discharge machining (EDM). A certain conductivity is however required for this process. To fulfill this requirement, the method of an assisting electrode (AE) is used. During the process, an intrinsic AE is generated from the cracked dielectric oil and deposited on the ceramic surface. The process can therefore continue even after the applied AE has been penetrated. For a deeper understanding of the present removal mechanism EDM of non-conducting ceramics, especially in the area of micro EDM, an investigation of the influence of conductivity is necessary. Therefore three silicon carbide ceramics with different electrical conductivity (S-SiC: 1 10 -7 S/cm ; LR-SiC: 10 S/cm ; HO-SiC: 5 10 -9 S/cm ) have been microstructured and analysed. It is found that the conductivity of the silicon carbide materials has no influence on the machinability, all samples can be microstructured. The microsections of the machined samples show that the near-surface structure of the SiC materials is not negatively influenced by the EDM process. The analysis of the surface revealed indications that for S-SiC and for HO-SiC, thermal spalling is the present removal mechanism. The LR-SiC surface shows melting structures. The material removal rate of LR-SiC is 8 × 10 -3 mm3/min , whereas the material removal rate of the S-SiC and the HO-SiC ranges at 3 × 10 -3 mm3/min . The high MRR of the LR-SiC indicates a removal mechanism analog to Silicon infiltrated Silicon carbide (SiSiC), with removal of a conductive phase.