Cantilever-in-cantilever micromachined pressure sensors fabricated in CMOS technology

Abstract

The resonance characteristics of an oscillating microcantilever are modified due to the changing damping effects as the ambient air pressure varies. Such a device may be employed as a pressure sensor. We have designed modeled, and tested a CMOS micromachined magnetically actuated cantilever pressure sensor. Five variations of a cantilever-in-cantilever (CIC) device were tested for changes in amplitude of oscillation, resonant frequency, quality factor, damping relation, and actuating current required as the pressure was varied from 15 to 1450 Torr.