Cantilever-Based Biosensors in CMOS Technology

Abstract

Single-chip CMOS-based biosensors that feature microcantilevers as transducer\nelements are presented. The cantilevers are functionalized for the capturing of\nspecific analytes, e.g., proteins or DNA. The binding of the analyte changes\nthe mechanical properties of the cantilevers such as surface stress and\nresonant frequency, which can be detected by an integrated Wheatstone bridge.\nThe monolithic integrated readout allows for a high signal-to-noise ratio,\nlowers the sensitivity to external interference and enables autonomous device\noperation.\n