Static and dynamic characterization of magnetically actuated CMOS-micromachined cantilever-in-cantilever devices

Abstract

In this paper we compare the performance of several magnetically actuated CMOS- micromachined cantilever-in-cantilever structures. We also investigate the importance of thermal effects to the actuation and determine that these are significant only for static deflection operations; resonant frequencies show very little thermal dependence at the currents we employed, since large deflections were observed. Qualitative analysis of device behaviour is given using simplified formulae, and a more precise simulation is obtained using a finite element software package (ANSYS). These results are compared with experimental data.