Dynamic response of a magnetically actuated micromachined cantilever with a Permalloy electroplated film

Abstract

A magnetically actuated cantilever structure was designed, fabricated, and tested. The actuation of the device is based on the interaction between a Permalloy film and an external magnetic field. The device is a rectangular SiO/sub 2/ platform 1 /spl mu/m thick supported by a pair of 1 /spl mu/m thick SiO/sub 2/ cantilevers. On the top of the platform is a 5 /spl mu/m Permalloy layer deposited by electroplating. The device has large deflection angles (/spl sim/45/spl deg/) in both the static and dynamic cases, for magnetic fields of 130 G, and 3 G at resonance, respectively.