Texture Evolution of Cu Thin Films during Annealing

JOURNAL ARTICLE

Year: 2002 Journal: Materials science forum Vol: 408-412 Pages: 1639-1644 Publisher: Trans Tech Publications

DOI: 10.4028/www.scientific.net/msf.408-412.1639

Keywords:

Materials science Annealing (glass) Thin film Metallurgy Chemical engineering Nanotechnology

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