JOURNAL ARTICLE
Time evolution of heterogeneous thin films during annealing
Akiko NatoriMasahiro BabaHitoshi Yasunaga
Year: 1989 Journal: Surface Science Letters Vol: 220 (1)Pages: A472-A472 Publisher: Elsevier BV
Keywords:
Annealing (glass) Materials science Thin film Nanotechnology Composite material
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Topics
Surface and Thin Film Phenomena
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
Optical Coatings and Gratings
Physical Sciences → Materials Science → Surfaces, Coatings and Films
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