JOURNAL ARTICLE

One-step maskless grayscale lithography for the fabrication of 3-dimensional structures in SU-8

Keywords:
Photoresist Fabrication Materials science Grayscale Lithography Maskless lithography Cantilever Microfabrication Photolithography Resist Nanotechnology Process (computing) Digital micromirror device Optoelectronics Layer (electronics) Computer science Electron-beam lithography Artificial intelligence

Metrics

121
Cited By
2.79
FWCI (Field Weighted Citation Impact)
38
Refs
0.90
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Electrowetting and Microfluidic Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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