One-step maskless grayscale lithography for the fabrication of 3-dimensional structures in SU-8

Amritha Rammohan; Prabhat K. Dwivedi; Rodrigo Martínez‐Duarte; Hari Katepalli; Marc Madou; Ashutosh Sharma

doi:10.1016/j.snb.2010.10.021

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One-step maskless grayscale lithography for the fabrication of 3-dimensional structures in SU-8

Amritha Rammohan Prabhat K. Dwivedi Rodrigo Martínez‐Duarte Hari Katepalli Marc Madou Ashutosh Sharma

Year: 2010 Journal: Sensors and Actuators B Chemical Vol: 153 (1)Pages: 125-134 Publisher: Elsevier BV

DOI: 10.1016/j.snb.2010.10.021

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Keywords:

Photoresist Fabrication Materials science Grayscale Lithography Maskless lithography Cantilever Microfabrication Photolithography Resist Nanotechnology Process (computing) Digital micromirror device Optoelectronics Layer (electronics) Computer science Electron-beam lithography Artificial intelligence

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Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electrowetting and Microfluidic Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

One-step maskless grayscale lithography for the fabrication of 3-dimensional structures in SU-8

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