JOURNAL ARTICLE
Data-driven optimization of maskless grayscale laser lithography
Adrian H. A. LuteyDavid KuhnessSeyyedhossein MckeeVincenzo FerraroMarco NegozioWalter BelardiLuca RomoliMarkus PostlBarbara Stadlober
Year: 2025 Journal: Scientific Reports Vol: 15 (1)Pages: 40063-40063 Publisher: Nature Portfolio
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