JOURNAL ARTICLE

Design and fabrication of SU-8 CMUT arrays through grayscale lithography

Chang GeEdmond Cretu

Year: 2018 Journal:   Sensors and Actuators A Physical Vol: 280 Pages: 368-375   Publisher: Elsevier BV
Keywords:
Grayscale Lithography Fabrication Materials science Capacitive micromachined ultrasonic transducers Optoelectronics Optics Physics Composite material Pixel

Metrics

10
Cited By
0.61
FWCI (Field Weighted Citation Impact)
38
Refs
0.71
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering
Piezoelectric Actuators and Control
Physical Sciences →  Engineering →  Control and Systems Engineering
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