Design and fabrication of SU-8 CMUT arrays through grayscale lithography

Chang Ge; Edmond Cretu

doi:10.1016/j.sna.2018.08.006

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JOURNAL ARTICLE

Design and fabrication of SU-8 CMUT arrays through grayscale lithography

Chang Ge Edmond Cretu

Year: 2018 Journal: Sensors and Actuators A Physical Vol: 280 Pages: 368-375 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2018.08.006

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Keywords:

Grayscale Lithography Fabrication Materials science Capacitive micromachined ultrasonic transducers Optoelectronics Optics Physics Composite material Pixel

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Piezoelectric Actuators and Control

Physical Sciences → Engineering → Control and Systems Engineering

Design and fabrication of SU-8 CMUT arrays through grayscale lithography

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