Growth of Ti thin films on sapphire substrates

S.R. Peddada; I.M. Robertson; Sanjay Dubé

doi:10.1557/jmr.1997.0255

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Growth of Ti thin films on sapphire substrates

S.R. Peddada I.M. Robertson Sanjay Dubé

Year: 1997 Journal: Journal of materials research/Pratt's guide to venture capital sources Vol: 12 (7)Pages: 1856-1865 Publisher: Springer Nature

DOI: 10.1557/jmr.1997.0255

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Keywords:

Materials science Sapphire Epitaxy Thin film Titanium Analytical Chemistry (journal) Crystal growth Crystal (programming language) Crystallography Composite material Metallurgy Optics Nanotechnology Layer (electronics)

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

High-Temperature Coating Behaviors

Physical Sciences → Engineering → Aerospace Engineering

Growth of Ti thin films on sapphire substrates

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