Growth of ZnO Thin Films on Sapphire Substrates by ECR-Assisted MBE

Hee-Bog Kang; Kiyoshi Nakamura; Kazuo Ishikawa

doi:10.1557/proc-474-395

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Growth of ZnO Thin Films on Sapphire Substrates by ECR-Assisted MBE

Hee-Bog Kang Kiyoshi Nakamura Kazuo Ishikawa

Year: 1997 Journal: MRS Proceedings Vol: 474 Publisher: Cambridge University Press

DOI: 10.1557/proc-474-395

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Keywords:

Sapphire Materials science Epitaxy Electron cyclotron resonance Molecular beam epitaxy Substrate (aquarium) Optoelectronics Sputtering Full width at half maximum Thin film Analytical Chemistry (journal) Nanotechnology Optics Layer (electronics) Chemistry Ion Laser

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Growth of ZnO Thin Films on Sapphire Substrates by ECR-Assisted MBE

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