Epitaxial growth of NH3-doped ZnO thin films on 〈〉 oriented sapphire substrates

Jinzhong Wang; Guotong Du; Baijun Zhao; Xiaotian Yang; Yuantao Zhang; Yan Ma; Dali Liu; Yuchun Chang; Haisong Wang; Hongjun Yang; Shuren Yang

doi:10.1016/s0022-0248(03)01241-7

JOURNAL ARTICLE

Epitaxial growth of NH3-doped ZnO thin films on 〈〉 oriented sapphire substrates

Jinzhong Wang Guotong Du Baijun Zhao Xiaotian Yang Yuantao Zhang Yan Ma Dali Liu Yuchun Chang Haisong Wang Hongjun Yang Shuren Yang

Year: 2003 Journal: Journal of Crystal Growth Vol: 255 (3-4)Pages: 293-297 Publisher: Elsevier BV

DOI: 10.1016/s0022-0248(03)01241-7

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Keywords:

X-ray photoelectron spectroscopy Sapphire Analytical Chemistry (journal) Electrical resistivity and conductivity Thin film Materials science Doping Epitaxy Chemical vapor deposition Crystal (programming language) Flux (metallurgy) Nitrogen Conductivity Chemical engineering Nanotechnology Chemistry Optoelectronics Optics Metallurgy Layer (electronics) Physical chemistry Laser

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Epitaxial growth of NH3-doped ZnO thin films on 〈〉 oriented sapphire substrates

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