Application of inertial micromachined (MEMS) sensors for precision displacement measurement

Abstract

Rapid developments of microelectronics combined with steadily increasing global competition in manufacturing have intensified the efforts to combine the advantages of automation, ultra precision engineering and top-down nanotechnology in the "next generation" manufacturing processes and equipment. But the demands of high speed, low-cost manufacturing strongly contradict, in terms of the desirable process and equipment features, the demands of precision. Achieving a qualitative progress in high volume, state-of-the-art manufacturing processes depends upon the availability of robust, accurate, and minimum-invasive sensors, capable of tracking the actual spatial movements of cutting tools and machined parts. The paper investigates a suitability of micromachined inertial sensors for accurate estimation of translational and rotational displacements in metal removal processes. It identifies key obstacles in achieving the needed performance and available methods for eliminating them. Analytical considerations are illustrated with experimental results obtained in the laboratory and shop-floor conditions.