BOOK-CHAPTER
Micromachined Gas Inertial Sensors
Year: 2018 Micro/Nano technologies Pages: 517-538 Publisher: Springer Nature
Keywords:
Inertial frame of reference Accelerometer Thermistor Proof mass Inertial measurement unit Gyroscope Thermal Inertial reference unit Surface micromachining Materials science Aerospace engineering Mechanical engineering Acoustics Microelectromechanical systems Fabrication Optoelectronics Engineering Inertial navigation system Computer science Electrical engineering Physics Classical mechanics Meteorology
Metrics
0
Cited By
0.00
FWCI (Field Weighted Citation Impact)
29
Refs
0.42
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Geophysics and Sensor Technology
Physical Sciences → Engineering → Ocean Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Related Documents
JOURNAL ARTICLE
Micromachined inertial sensors
Cimoo SongByeoungju HaSukhan Lee
Year: 2003 Vol: 2 Pages: 1049-1056
JOURNAL ARTICLE
Micromachined inertial sensors
N. YazdiFarrokh AyaziK. Najafi
Journal: Proceedings of the IEEE Year: 1998 Vol: 86 (8)Pages: 1640-1659
JOURNAL ARTICLE
Micromachined inertial sensors for vehicles
N. BarbourEric J. BrownJ. ConnellyJohn DowdleG. BrandJames A. NelsonJanelle O'Bannon
Year: 2002 Pages: 1058-1063