JOURNAL ARTICLE

Roughness, impurities and strain in low-temperature epitaxial silicon films grown by tantalum filament hot-wire chemical vapor deposition

Keywords:
Materials science Epitaxy Chemical vapor deposition Silicon Wafer Silane Surface roughness Surface finish Nucleation Composite material Optoelectronics Layer (electronics) Chemistry

Metrics

2
Cited By
0.34
FWCI (Field Weighted Citation Impact)
22
Refs
0.66
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advancements in Semiconductor Devices and Circuit Design
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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