JOURNAL ARTICLE

Silicon homoepitaxy using tantalum-filament hot-wire chemical vapor deposition

Keywords:
Materials science Epitaxy Silicon Chemical vapor deposition Tantalum Analytical Chemistry (journal) Wafer Transmission electron microscopy Hydrogen Substrate (aquarium) Scanning electron microscope Ellipsometry Thin film Optoelectronics Nanotechnology Composite material Layer (electronics) Metallurgy

Metrics

5
Cited By
0.97
FWCI (Field Weighted Citation Impact)
16
Refs
0.76
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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