JOURNAL ARTICLE
A Phase Diagram of Low Temperature Epitaxial Silicon Grown by Hot-wire Chemical Vapor Deposition for Photovoltaic Devices
Christine RichardsonBrendan M. KayesMatthew J. DickenHarry A. Atwater
Year: 2004 Journal: MRS Proceedings Vol: 862 (1) Publisher: Cambridge University Press
Keywords:
Materials science Epitaxy Reflection high-energy electron diffraction Substrate (aquarium) Silicon Chemical vapor deposition Electron diffraction Optoelectronics Transmission electron microscopy Nanotechnology Diffraction Optics Layer (electronics)
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Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon and Solar Cell Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Optical Coatings and Gratings
Physical Sciences → Materials Science → Surfaces, Coatings and Films
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