JOURNAL ARTICLE
Buried oxide layers formed by low-dose oxygen implantation
Year: 1992 Journal: Journal of materials research/Pratt's guide to venture capital sources Vol: 7 (4)Pages: 788-790 Publisher: Springer Nature
Keywords:
Annealing (glass) Materials science Transmission electron microscopy Oxide Analytical Chemistry (journal) Atmospheric temperature range Oxygen Composite material Metallurgy Nanotechnology Chemistry
Metrics
16
Cited By
0.89
FWCI (Field Weighted Citation Impact)
9
Refs
0.77
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Ion-surface interactions and analysis
Physical Sciences → Engineering → Computational Mechanics
Electronic and Structural Properties of Oxides
Physical Sciences → Materials Science → Materials Chemistry
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