JOURNAL ARTICLE

Mechanical and Adhesion Behaviours of Superhard (Ti,Si,Al)N Nanocomposite Films Grown by Reactive Magnetron Sputtering

S. CarvalhoL. ReboutaA. CavaleiroE. Alves

Year: 2002 Journal:   Key engineering materials Vol: 230-232 Pages: 185-188   Publisher: Trans Tech Publications
Keywords:
Materials science Nanocomposite Adhesion Composite material Sputter deposition Sputtering Cavity magnetron Metallurgy Thin film Nanotechnology

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Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Boron and Carbon Nanomaterials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Advanced ceramic materials synthesis
Physical Sciences →  Materials Science →  Ceramics and Composites
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