Mechanical and Adhesion Behaviours of Superhard (Ti,Si,Al)N Nanocomposite Films Grown by Reactive Magnetron Sputtering

JOURNAL ARTICLE

Year: 2002 Journal: Key engineering materials Vol: 230-232 Pages: 185-188 Publisher: Trans Tech Publications

DOI: 10.4028/www.scientific.net/kem.230-232.185

Keywords:

Materials science Nanocomposite Adhesion Composite material Sputter deposition Sputtering Cavity magnetron Metallurgy Thin film Nanotechnology

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Boron and Carbon Nanomaterials Research

Physical Sciences → Materials Science → Materials Chemistry

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites