Grain Matrix Made with Excimer-Laser Crystallization of Thin Silicon Films

Paul C. van der Wilt; Ryoichi Ishihara

doi:10.4028/www.scientific.net/ssp.67-68.169

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Grain Matrix Made with Excimer-Laser Crystallization of Thin Silicon Films

Paul C. van der Wilt Ryoichi Ishihara

Year: 1999 Journal: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena Vol: 67-68 Pages: 169-174 Publisher: Scientific.net

DOI: 10.4028/www.scientific.net/ssp.67-68.169

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Keywords:

Materials science Excimer laser Crystallization Silicon Thin film Matrix (chemical analysis) Composite material Optoelectronics Laser Chemical engineering Optics Nanotechnology

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Surface Roughness and Optical Measurements

Physical Sciences → Engineering → Computational Mechanics

Grain Matrix Made with Excimer-Laser Crystallization of Thin Silicon Films

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