Thin Film Boron Doped Polycrystalline Silicon/sub70%/-germanium/sub30%/ For Thermopiles

P. Van Gerwen; Thomas J. A. Slater; J.B. Chevrier; Kris Baert; R. Mertens

doi:10.1109/sensor.1995.721782

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Thin Film Boron Doped Polycrystalline Silicon/sub70%/-germanium/sub30%/ For Thermopiles

P. Van Gerwen Thomas J. A. Slater J.B. Chevrier Kris Baert R. Mertens

Year: 2005 Journal: Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 Vol: 2 Pages: 210-213

DOI: 10.1109/sensor.1995.721782

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Keywords:

Germanium Materials science Doping Polycrystalline silicon Boron Silicon Optoelectronics Thermopile Silicon-germanium Crystallite Optics Nanotechnology Thin-film transistor Metallurgy Chemistry Physics Infrared

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Silicon and Solar Cell Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Thin Film Boron Doped Polycrystalline Silicon/sub70%/-germanium/sub30%/ For Thermopiles

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