JOURNAL ARTICLE
Media compatible stainless steel capacitive pressure sensors
Shih-Shian HoSrihari RajgopalMehran Mehregany
Year: 2012 Journal: Sensors and Actuators A Physical Vol: 189 Pages: 134-142 Publisher: Elsevier BV
Keywords:
Materials science Capacitive sensing Tungsten carbide Tetramethylammonium hydroxide Pressure sensor Potassium hydroxide Sodium hydroxide Ambient pressure Optoelectronics Composite material Electrical engineering Nanotechnology Chemical engineering Mechanical engineering Engineering
Metrics
16
Cited By
0.44
FWCI (Field Weighted Citation Impact)
22
Refs
0.70
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Sensor Technologies Research
Physical Sciences → Engineering → Biomedical Engineering
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
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