JOURNAL ARTICLE

CMOS-compatible capacitive high temperature pressure sensors

Klaus KastenJ. AmelungW. Mokwa

Year: 2000 Journal:   Sensors and Actuators A Physical Vol: 85 (1-3)Pages: 147-152   Publisher: Elsevier BV
Keywords:
Materials science CMOS Capacitive sensing Atmospheric temperature range Optoelectronics Chip Temperature coefficient Temperature measurement Pressure sensor Electrical engineering Engineering Composite material Mechanical engineering Physics

Metrics

64
Cited By
1.90
FWCI (Field Weighted Citation Impact)
10
Refs
0.87
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering
3D IC and TSV technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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