JOURNAL ARTICLE
CMOS-compatible capacitive high temperature pressure sensors
Klaus KastenJ. AmelungW. Mokwa
Year: 2000 Journal: Sensors and Actuators A Physical Vol: 85 (1-3)Pages: 147-152 Publisher: Elsevier BV
Keywords:
Materials science CMOS Capacitive sensing Atmospheric temperature range Optoelectronics Chip Temperature coefficient Temperature measurement Pressure sensor Electrical engineering Engineering Composite material Mechanical engineering Physics
Metrics
64
Cited By
1.90
FWCI (Field Weighted Citation Impact)
10
Refs
0.87
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences → Engineering → Biomedical Engineering
3D IC and TSV technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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