Demonstration for integrating capacitive pressure sensors with read-out circuitry on stainless steel substrate

Sung‐Pil Chang; Mark G. Allen

doi:10.1016/j.sna.2004.04.010

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Demonstration for integrating capacitive pressure sensors with read-out circuitry on stainless steel substrate

Sung‐Pil Chang Mark G. Allen

Year: 2004 Journal: Sensors and Actuators A Physical Vol: 116 (2)Pages: 195-204 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2004.04.010

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Keywords:

Capacitive sensing Kapton Pressure sensor Materials science Chip Electrical engineering Substrate (aquarium) Optoelectronics Voltage Diaphragm (acoustics) Polyimide Electronic engineering Nanotechnology Mechanical engineering Engineering Layer (electronics)

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Demonstration for integrating capacitive pressure sensors with read-out circuitry on stainless steel substrate

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