Mechanical properties and oxidation resistance of nanocomposite TiN–SiNx physical-vapor-deposited thin films

Matthieu Diserens; Jörg Patscheider; F. Lévy

doi:10.1016/s0257-8972(99)00481-8

ScienceGate Book Chapters

JOURNAL ARTICLE

Mechanical properties and oxidation resistance of nanocomposite TiN–SiNx physical-vapor-deposited thin films

Matthieu Diserens Jörg Patscheider F. Lévy

Year: 1999 Journal: Surface and Coatings Technology Vol: 120-121 Pages: 158-165 Publisher: Elsevier BV

DOI: 10.1016/s0257-8972(99)00481-8

Get Full-Text PDF Get Analytical Report

Keywords:

Materials science Nanocomposite Tin Thin film Physical vapor deposition Composite material Titanium nitride Nanotechnology Metallurgy Nitride Layer (electronics)

Metrics

245

Cited By

12.26

FWCI (Field Weighted Citation Impact)

Refs

0.99

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Boron and Carbon Nanomaterials Research

Physical Sciences → Materials Science → Materials Chemistry

Mechanical properties and oxidation resistance of nanocomposite TiN–SiNx physical-vapor-deposited thin films

Metrics

Citation History

Topics

Related Documents

Microstructural and mechanical properties of sputter deposited TiN/SiNx multilayer thin films

Ni-toughened nc-TiN/a-SiNx nanocomposite thin films

Oxidation resistance and mechanical properties of sputter-deposited Ti0.9Al0.1B2-y thin films

Comparison of mechanical properties of thin films of SiNx deposited on silicon

High temperature oxidation resistance of physical vapor deposited Hf-Si-B2±z thin films