JOURNAL ARTICLE

High temperature oxidation resistance of physical vapor deposited Hf-Si-B2±z thin films

Abstract

Within physical vapor deposited Hf-Si-B2±z thin films, selective diffusion-driven oxidation of Si is identified to cause outstanding oxidation resistance at temperatures up to 1500 °C. After 60 h at 1200 °C, the initially 2.47 µm thin Hf0.20Si0.23B0.57 thin film exhibits a dense oxide scale of only 1.56 µm. The thermally induced decomposition of metastable Hf-Si-B2±z leads not only to the formation of Si precipitates within the remaining thin film (related to a non-homogenous Si distribution after the deposition) but also to pure Si layers on top and bottom of the Hf-Si-B2±z coatings next to the excellent adherend SiO2 based scales.

Keywords:
Thin film Materials science Metastability Physical vapor deposition Chemical vapor deposition Oxide Corrosion Deposition (geology) Diffusion Silicon Chemical engineering Analytical Chemistry (journal) Composite material Metallurgy Nanotechnology Chemistry Thermodynamics

Metrics

16
Cited By
2.05
FWCI (Field Weighted Citation Impact)
45
Refs
0.82
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced ceramic materials synthesis
Physical Sciences →  Materials Science →  Ceramics and Composites
Advanced materials and composites
Physical Sciences →  Engineering →  Mechanical Engineering
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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