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Comparison of mechanical properties of thin films of SiNx deposited on silicon

Keywords:
Plasma-enhanced chemical vapor deposition Nanoindentation Materials science Substrate (aquarium) Composite material Silicon Silicon nitride Modulus Optoelectronics

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Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
GaN-based semiconductor devices and materials
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics

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