Comparison of mechanical properties of thin films of SiNx deposited on silicon

M. Ekwińska; Krzysztof Wielgo; Z. Rymuza

doi:10.1007/978-3-540-73956-2_105

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Comparison of mechanical properties of thin films of SiNx deposited on silicon

M. Ekwińska Krzysztof Wielgo Z. Rymuza

Year: 2007 Pages: 536-540

DOI: 10.1007/978-3-540-73956-2_105

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Keywords:

Plasma-enhanced chemical vapor deposition Nanoindentation Materials science Substrate (aquarium) Composite material Silicon Silicon nitride Modulus Optoelectronics

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Comparison of mechanical properties of thin films of SiNx deposited on silicon

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