Polyimide films by glow discharge vapor deposition polymerization

G. Maggioni; S. Carturan; V. Rigato

doi:10.1016/s0167-577x(98)00102-5

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Polyimide films by glow discharge vapor deposition polymerization

G. Maggioni S. Carturan V. Rigato

Year: 1998 Journal: Materials Letters Vol: 37 (4-5)Pages: 259-262 Publisher: Elsevier BV

DOI: 10.1016/s0167-577x(98)00102-5

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Keywords:

Materials science Polyimide Pyromellitic dianhydride Glow discharge Polymerization Monomer Evaporation Sputtering Chemical engineering Plasma polymerization Ion plating Physical vapor deposition Sputter deposition Chemical vapor deposition Deposition (geology) Curing (chemistry) Analytical Chemistry (journal) Polymer chemistry Electron beam physical vapor deposition Thin film Polymer Composite material Organic chemistry Plasma Optoelectronics Nanotechnology Layer (electronics) Chemistry

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Topics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Polyimide films by glow discharge vapor deposition polymerization

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