JOURNAL ARTICLE

Surface characterization of fluorinated polyimide films grown by vapor deposition polymerization

Yasuko Yamada MaruoYasuko AndohShigekuni Sasaki

Year: 1993 Journal:   Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Vol: 11 (5)Pages: 2590-2596   Publisher: American Institute of Physics

Abstract

Vapor deposition polymerization (VDP) was used to prepare fluorinated polyimide films. The process utilizes the coevaporation of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride (6FDA) and 2,2′-bis(trifluoromethyl)-4,4′-diaminobiphenyl (TFDB) monomers. We characterized the surface by x-ray photoelectron spectroscopy (XPS), scanning electron microscopy, atomic force microscopy (AFM), and scanning tunneling microscopy (STM). The XPS analysis showed that the film stoichiometry greatly depended on the ratio of source effusion rates, and that a 6FDA/TFDB pressure ratio of 1:10 was best for obtaining stoichiometric 6FDA/TFDB polyimide. The surface structure image obtained by AFM was clearly different from that of spin-cast films. The surface morphology of the VDP films was characterized by an accumulation of parallel rod shaped structures, whereas that of the spin-cast one was a rough structure. The surface morphology of the VDP grown films at the initial growth state was also found to be a vertical stripe structure according to STM results.

Keywords:
X-ray photoelectron spectroscopy Polyimide Polymerization Materials science Scanning electron microscope Stoichiometry Scanning tunneling microscope Chemical vapor deposition Polymer Chemical engineering Thin film Deposition (geology) Polymer chemistry Analytical Chemistry (journal) Chemistry Nanotechnology Layer (electronics) Composite material Organic chemistry

Metrics

18
Cited By
0.88
FWCI (Field Weighted Citation Impact)
0
Refs
0.70
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Synthesis and properties of polymers
Physical Sciences →  Materials Science →  Polymers and Plastics
Adhesion, Friction, and Surface Interactions
Physical Sciences →  Engineering →  Mechanics of Materials
Electrical Contact Performance and Analysis
Physical Sciences →  Engineering →  Mechanical Engineering

Related Documents

JOURNAL ARTICLE

Polyimide films by glow discharge vapor deposition polymerization

G. MaggioniS. CarturanV. Rigato

Journal:   Materials Letters Year: 1998 Vol: 37 (4-5)Pages: 259-262
JOURNAL ARTICLE

Characterization of vapor deposition polymerized polyimide thin films

Jwo‐Huei JouChien-Li ChengEmily Chin-Yi JouArnold C.‐M. Yang

Journal:   Journal of Polymer Science Part B Polymer Physics Year: 1996 Vol: 34 (13)Pages: 2239-2246
JOURNAL ARTICLE

Vapor Deposition Polymerization and Molecular Orientation of Polyimide Thin Films

Yamazaki TakatoshiChanya MahapunSatoshi UsuiKuniaki TanakaHiroaki Usui

Journal:   Journal of Physics Conference Series Year: 2017 Vol: 924 Pages: 012017-012017
© 2026 ScienceGate Book Chapters — All rights reserved.