Fabrication of high-aspect-ratio coil for electromagnetic actuators using LIGA process

Abstract

Actuators are finding increasing use in the various fields. And, it is one of the most important parts of machine in motion because of determine its performance. Recently, the demands for various actuators are smaller size, higher output power, lower input electrical power, and so on. To realize these demands, the key technology is processing of microfabrication. We achieved development of the three-dimensional deep X-ray lithography technique for the spiral micro coil with a high inductance. Therefore, we have fabricated and estimated the solenoidal electromagnetic type microactuator of a low driving power by using this technique. This actuator having the high aspect ratio of coil line is also expected a great force in spite of miniature size. Now, we have obtained the coil line with the width of 10 μm and the aspect ratio of 5. We have also fabricated the measurement system for suction force of electromagnetic actuator. The coil model was measured by this system, and results were relatively in good agreement with simulation results. Using this high aspect coil made by X-ray lithography technique, the electromagnetic actuators have been expected to manufacture with high output force in smaller size.