High aspect ratio electrostatic micro actuators using LIGA process

Ryuji Kondo; Shinya Takimoto; Kenta Suzuki; S. Sugiyama

doi:10.1007/s005420000064

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JOURNAL ARTICLE

High aspect ratio electrostatic micro actuators using LIGA process

Ryuji Kondo Shinya Takimoto Kenta Suzuki S. Sugiyama

Year: 2000 Journal: Microsystem Technologies Vol: 6 (6)Pages: 218-221 Publisher: Springer Science+Business Media

DOI: 10.1007/s005420000064

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Keywords:

Electroforming LIGA Materials science Resist Substrate (aquarium) Electrode Actuator Voltage Etching (microfabrication) Optoelectronics Comb drive Aspect ratio (aeronautics) Speed wobble Microstructure Layer (electronics) Fabrication Composite material Electrical engineering Engineering

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Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

3D IC and TSV technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

High aspect ratio electrostatic micro actuators using LIGA process

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