Fabrication of High Aspect Ratio Microcoils for Electromagnetic Actuators

Abstract

We have fabricated spiral coil with high aspect ratio coil lines for solenoid type electromagnetic actuator using 3D X-ray lithography and metallization techniques. Using these techniques, we succeeded in producing a spiral structure with 10 m width coil line structures with maximum aspect ratio of about 5. We also succeeded in electroforming copper in the high aspect ratio structure and forming a coil by isotropic copper etching. Then, we could be obtained coil pattern on acrylic pipe with high aspect ratio.