JOURNAL ARTICLE

Perovskite oxynitride LaTiOxNy thin films: Dielectric characterization in low and high frequencies

Keywords:
Materials science Dielectric Thin film Sputter deposition Substrate (aquarium) Silicon oxynitride Crystallite Dielectric loss Sputtering High-κ dielectric Silicon Optoelectronics Analytical Chemistry (journal) Nanotechnology Metallurgy Chemistry

Metrics

11
Cited By
1.05
FWCI (Field Weighted Citation Impact)
14
Refs
0.78
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Inorganic Chemistry and Materials
Physical Sciences →  Chemistry →  Inorganic Chemistry
Ferroelectric and Piezoelectric Materials
Physical Sciences →  Materials Science →  Materials Chemistry
MXene and MAX Phase Materials
Physical Sciences →  Materials Science →  Materials Chemistry
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