JOURNAL ARTICLE

Mask aligner lithography simulation – From lithography simulation to process validation

Keywords:
Photoresist Lithography Photolithography X-ray lithography Materials science Computational lithography Process (computing) Next-generation lithography Resist Computer science Maskless lithography Nanotechnology Optics Optoelectronics Electron-beam lithography Physics

Metrics

13
Cited By
1.09
FWCI (Field Weighted Citation Impact)
10
Refs
0.82
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Industrial Vision Systems and Defect Detection
Physical Sciences →  Engineering →  Industrial and Manufacturing Engineering
Advanced Measurement and Metrology Techniques
Physical Sciences →  Engineering →  Mechanical Engineering

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