Superconducting niobium nitride films deposited by unbalanced magnetron sputtering

J.J. Olaya; L. Huerta; Sandra E. Rodil; R. Escamilla

doi:10.1016/j.tsf.2008.06.065

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Superconducting niobium nitride films deposited by unbalanced magnetron sputtering

J.J. Olaya L. Huerta Sandra E. Rodil R. Escamilla

Year: 2008 Journal: Thin Solid Films Vol: 516 (23)Pages: 8768-8773 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2008.06.065

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Keywords:

Niobium nitride Materials science Sputter deposition Niobium Nanocrystalline material Nitride Condensed matter physics Sputtering Thin film Analytical Chemistry (journal) Metallurgy Composite material Chemistry Nanotechnology

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Superconducting niobium nitride films deposited by unbalanced magnetron sputtering

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