JOURNAL ARTICLE

Magnetron sputtering of TiO N films

D. HeřmanJ. Šı́chaJ. Musil

Year: 2006 Journal:   Vacuum Vol: 81 (3)Pages: 285-290   Publisher: Elsevier BV
Keywords:
Anatase Materials science Nanocrystalline material Sputter deposition Analytical Chemistry (journal) Band gap Rutile Thin film Sputtering Irradiation Titanium dioxide Cavity magnetron Doping Photocatalysis Chemical engineering Optoelectronics Chemistry Nanotechnology Composite material Organic chemistry

Metrics

44
Cited By
3.37
FWCI (Field Weighted Citation Impact)
22
Refs
0.91
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

TiO2 Photocatalysis and Solar Cells
Physical Sciences →  Energy →  Renewable Energy, Sustainability and the Environment
Advanced Photocatalysis Techniques
Physical Sciences →  Energy →  Renewable Energy, Sustainability and the Environment
Gas Sensing Nanomaterials and Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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