JOURNAL ARTICLE
Growth of diamond films by microwave plasma chemical vapor deposition
Gao KelinRu-Juan ZhanXiang ZhilinChunlin WangDingkun PengMeng Guongyao
Year: 1991 Journal: Vacuum Vol: 42 (16)Pages: 1084-1085 Publisher: Elsevier BV
Keywords:
Chemical vapor deposition Diamond Plasma Microwave Materials science Carbon film Ion source Deposition (geology) Analytical Chemistry (journal) Optoelectronics Thin film Chemistry Nanotechnology Environmental chemistry Metallurgy Physics Geology
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FWCI (Field Weighted Citation Impact)
0
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0.20
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Topics
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Advanced Materials Characterization Techniques
Physical Sciences → Engineering → Biomedical Engineering
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