Biased enhanced growth of nanocrystalline diamond films by microwave plasma chemical vapor deposition

T. Sharda; Tetsuo Soga; T. Jimbo; M. Umeno

doi:10.1016/s0925-9635(00)00247-8

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Biased enhanced growth of nanocrystalline diamond films by microwave plasma chemical vapor deposition

T. Sharda Tetsuo Soga T. Jimbo M. Umeno

Year: 2000 Journal: Diamond and Related Materials Vol: 9 (7)Pages: 1331-1335 Publisher: Elsevier BV

DOI: 10.1016/s0925-9635(00)00247-8

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Keywords:

Raman spectroscopy Chemical vapor deposition Diamond Auger electron spectroscopy Materials science Nanocrystalline material Carbon film Analytical Chemistry (journal) Plasma-enhanced chemical vapor deposition Synthetic diamond Silicon Carbon fibers Thin film Nanotechnology Chemistry Optics Optoelectronics Composite material

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4.75

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0.96

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Topics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Biased enhanced growth of nanocrystalline diamond films by microwave plasma chemical vapor deposition

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Citation History

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