Fabrication and vacuum annealing of transparent conductive AZO thin films prepared by DC magnetron sputtering

Guojia Fang; Dejie Li; Baolun Yao

doi:10.1016/s0042-207x(02)00544-4

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Fabrication and vacuum annealing of transparent conductive AZO thin films prepared by DC magnetron sputtering

Guojia Fang Dejie Li Baolun Yao

Year: 2002 Journal: Vacuum Vol: 68 (4)Pages: 363-372 Publisher: Elsevier BV

DOI: 10.1016/s0042-207x(02)00544-4

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Keywords:

Materials science Annealing (glass) Thin film Sputter deposition Electrical resistivity and conductivity Electrical conductor Optoelectronics Sputtering Transparent conducting film Fabrication Ceramic Cavity magnetron Band gap Composite material Nanotechnology Electrical engineering

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Fabrication and vacuum annealing of transparent conductive AZO thin films prepared by DC magnetron sputtering

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