Prototyping of three-dimensional photonic crystal structures using electron-beam lithography

Ganapathi Subramania; J. Rivera

doi:10.1557/proc-846-dd12.3

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Prototyping of three-dimensional photonic crystal structures using electron-beam lithography

Ganapathi Subramania J. Rivera

Year: 2004 Journal: MRS Proceedings Vol: 846 Publisher: Cambridge University Press

DOI: 10.1557/proc-846-dd12.3

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Keywords:

Materials science Photonic crystal Optoelectronics Yablonovite Electron-beam lithography Fabrication Lithography Photonics Diamond cubic Band gap Photonic metamaterial Optics Photonic integrated circuit Layer (electronics) Diamond Resist Nanotechnology

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Topics

Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Prototyping of three-dimensional photonic crystal structures using electron-beam lithography

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