Dwell-time effects in focused ion beam synthesis of cobalt disilicide: reflectivity measurements

S. Hausmann; L. Bischoff; M. Voelskow; J. Teichert; W. Möller; H. Fuhrmann

doi:10.1016/s0168-583x(98)00786-1

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Dwell-time effects in focused ion beam synthesis of cobalt disilicide: reflectivity measurements

S. Hausmann L. Bischoff M. Voelskow J. Teichert W. Möller H. Fuhrmann

Year: 1999 Journal: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Vol: 148 (1-4)Pages: 610-614 Publisher: Elsevier BV

DOI: 10.1016/s0168-583x(98)00786-1

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Keywords:

Cobalt Dwell time Reflectivity Materials science Ion Ion beam Beam (structure) Metallurgy Optics Chemistry Psychology Physics

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Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Integrated Circuits and Semiconductor Failure Analysis

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Dwell-time effects in focused ion beam synthesis of cobalt disilicide: reflectivity measurements

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