JOURNAL ARTICLE

Dwell-time effects in focused ion beam synthesis of cobalt disilicide: reflectivity measurements

S. HausmannL. BischoffM. VoelskowJ. TeichertW. MöllerH. Fuhrmann

Year: 1999 Journal:   Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Vol: 148 (1-4)Pages: 610-614   Publisher: Elsevier BV
Keywords:
Cobalt Dwell time Reflectivity Materials science Ion Ion beam Beam (structure) Metallurgy Optics Chemistry Psychology Physics

Metrics

4
Cited By
0.63
FWCI (Field Weighted Citation Impact)
10
Refs
0.67
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Semiconductor materials and interfaces
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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