JOURNAL ARTICLE
Dwell time adjustment for focused ion beam machining
Jun TaniguchiShin‐ichi SatakeTakaki OosumiAkihisa FukushigeYasuo Kogo
Year: 2013 Journal: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Vol: 307 Pages: 248-252 Publisher: Elsevier BV
Keywords:
Dwell time Machining Materials science Polishing Focused ion beam Brittleness Optics Composite material Ion Metallurgy Physics
Metrics
8
Cited By
0.21
FWCI (Field Weighted Citation Impact)
11
Refs
0.59
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Force Microscopy Techniques and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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