Analysis of nonlinearity in high sensitivity piezoresistive pressure sensors

Santiago Marco; Josep Samitier; O. Ruiz; J.R. Morante; J. Estéve

doi:10.1016/0924-4247(93)80133-2

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Analysis of nonlinearity in high sensitivity piezoresistive pressure sensors

Santiago Marco Josep Samitier O. Ruiz J.R. Morante J. Estéve

Year: 1993 Journal: Sensors and Actuators A Physical Vol: 37-38 Pages: 790-795 Publisher: Elsevier BV

DOI: 10.1016/0924-4247(93)80133-2

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Keywords:

Piezoresistive effect Sensitivity (control systems) Nonlinear system Pressure sensor Finite element method Materials science Basis (linear algebra) Membrane Acoustics Sensibility Structural engineering Composite material Electronic engineering Mechanical engineering Engineering Mathematics Physics Chemistry Geometry

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Analysis of nonlinearity in high sensitivity piezoresistive pressure sensors

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